產品/業務
主要商品/服務項目:
三大核心技術
1.雷射微蝕刻 Laser etching
●特點:
雷射綠色生產技術 laser green technology
生產彈性化無光罩 free-mask production
精微製程簡單及高良率 simple micro-machining process with high yield
無熱效應 free-thermal effect
●規格:
蝕刻線寬 <10um
etching groove resolution<10um
蝕刻深度控制 <100nm
etching depth resolution <100nm
●應用:
薄膜線路直寫 thin film direct writing
厚膜線路直寫 thick film direct writing
2.雷射微鑽孔 Laser micro drilling
●特點:
可鑽任意形狀微孔 custom micro drilling shape
取代機鑽孔徑限制 overcome traditional driller limited
競爭電漿快速 faster than plasma solution
●規格:
孔徑<50um
drilling holes diameter <50um
深度控制 <1um
drilling depth resolution < 1um
●應用:
TGV/TSV鑽孔 glass/silicon/sapphire drilling
探針卡鑽孔 ceramic vertical drilling
表面微結構 surface micro-structure
3.雷射微切割 Laser micro cutting
●特點:
切割道小 small cutting groove
無碎裂及應力裂紋 free-crack and stress inside
高良率及無耗損 high yield with free routing cost
●規格:
切割溝 <10um
cutting grove <10um
深度控制<1um
depth resolution <1um
●應用:
Micro-LED cutting
Wafer cutting
機能性薄膜切割 functional materials cutting
特殊說明:
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